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A study of fundamental mechanisms of Si-B-N composite films deposited by duplex treatment

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Keywords: Duplex treatment; Negative bias voltage; Si-B-N composite thin film; Tribological performance

Document Type: Research Article

DOI: http://dx.doi.org/10.1016/S0042-207X(03)00014-9

Affiliations: College of Engineering Technology, China University of Geosciences, Xueyunan Road 29, 100083, Beijing, People's Republic of China

Publication date: July 25, 2003

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