Recent advances in ion-assisted growth of Cr/Sc multilayer X-ray mirrors for the water window

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Keywords: Chromium; Ion-assisted growth; Multilayer; Scandium; Sputtering; Water window; X-ray mirror

Document Type: Research Article


Affiliations: Thin Film Physics Division, IFM, Linkoping University, SE-581 83 , Linkoping, Sweden

Publication date: November 20, 2002

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