Precision dimensions control by measuring the gas flow through a gap between sample and test die
Authors: Pregelj, A.; Drab, M.; Pozun, K.; Ludvik, K.
Source: Vacuum, Volume 66, Number 1, June 2002 , pp. 87-89(3)
Document Type: Short Communication
Affiliations: IEVT, Teslova 30, , Ljubljana, Slovenia
Publication date: June 1, 2002