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Precision dimensions control by measuring the gas flow through a gap between sample and test die

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Keywords: Dimension control; Gap leak; Vacuum measurement

Document Type: Short Communication

DOI: http://dx.doi.org/10.1016/S0042-207X(01)00364-5

Affiliations: IEVT, Teslova 30, , Ljubljana, Slovenia

Publication date: June 1, 2002

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