If you are experiencing problems downloading PDF or HTML fulltext, our helpdesk recommend clearing your browser cache and trying again. If you need help in clearing your cache, please click here . Still need help? Email help@ingentaconnect.com

Hydrogen-ion implantation in GaAs

This article is hosted on another website.

You may be required to register, activate a subscription or purchase the article before you can obtain the full text.

Proceed

Download / Buy Article:

Keywords: Blistering; Direct bonding; Ion beam analysis; Ion implantation

Document Type: Research Article

DOI: http://dx.doi.org/10.1016/S0042-207X(01)00260-3

Affiliations: aInstitute of Electronic Materials Technology, ul. Wolczynska 133, 01-919 , Warsaw, Poland

Publication date: August 16, 2001

Related content

Tools

Favourites

Share Content

Access Key

Free Content
Free content
New Content
New content
Open Access Content
Open access content
Subscribed Content
Subscribed content
Free Trial Content
Free trial content
Cookie Policy
X
Cookie Policy
ingentaconnect website makes use of cookies so as to keep track of data that you have filled in. I am Happy with this Find out more