Ion sputtering of microparticles in SIMS depth profile analysis

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Keywords: Core-shell structure; Depth profiling; Microparticles; Sample rotation SIMS

Document Type: Research Article

DOI: http://dx.doi.org/10.1016/S0042-207X(01)00258-5

Affiliations: aInstitute of Vacuum Technology, ul Dluga 44/50, 00-241 , Warszawa, Poland

Publication date: August 16, 2001

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