In situ investigation of phase transitions of implanted silicon at powerful light irradiation

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Keywords: Defects; Implantation; Light pulse irradiation; Local melting; Monocrystalline; Silicon

Document Type: Research Article

DOI: http://dx.doi.org/10.1016/S0042-207X(01)00253-6

Affiliations: Kazan Physical-Technical Institute of the Russian Academy of Sciences, Sibirsky Trakt 10/7, Kazan 420029, , Tatarstan, Russia

Publication date: August 16, 2001

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