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Using of the high-grade layered structures for the demonstration of the depth resolution of the RBS method

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Keywords: Depth resolution; Metallic multilayers; Nanostructures; Rutherford back Scattering

Document Type: Research Article

DOI: http://dx.doi.org/10.1016/S0042-207X(01)00229-9

Affiliations: aFrank Laboratory of Neutron Physics, JINR, 141980 , Dubna, Russia

Publication date: August 16, 2001

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