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Detection of secondary electrons in a retarding electric field

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Keywords: Scanning low energy electron microscopy (SLEEM); Secondary electron detection

Document Type: Research Article

DOI: http://dx.doi.org/10.1016/S0042-207X(01)00222-6

Affiliations: Institute of Microsystem Technology, Wroclaw University of Technology, ul. Janiszewskiego 11, 50-372 , Wroclaw, Poland

Publication date: August 16, 2001

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