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A review of analysis methods for sub-micron indentation testing

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Keywords: Hardness; Indentation testing; Nanoindentation; Thin film testing

Document Type: Review Article

DOI: http://dx.doi.org/10.1016/S0042-207X(00)00377-8

Affiliations: CSIRO Division of Telecommunications and Industrial Physics, PO Box 218, , NSW 2070, Lindfield, Australia

Publication date: September 1, 2000

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