Authors: Kinoshita, H.; Honda, M.; Tatsuta, T.; Sakiya, F.
Source: Vacuum, Volume 55, Number 3, 1 December 1999, pp. 219-222(4)
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Document Type: Research Article
aResearch Institute of Electronics, Shizuoka University, 3-5-1 Johoku, Hamamatsu, Japan
Publication date: December 1, 1999