Application of the unipole mass filter for determination of the partial pressure of gases with near atomic mass number

Authors: Krol A.; Szuber J.; Kaszczyszyn S.

Source: Vacuum, Volume 54, Number 1, July 1999 , pp. 205-209(5)

Publisher: Elsevier

Keywords: Unipole mass filter; Partial pressure; Atomic mass number

Language: English

Document Type: Research article

DOI: http://dx.doi.org/10.1016/S0042-207X(98)00461-8

Affiliations: 1: aSilesian Technical University, Institute of Physics, Department of Semiconductors Surface Physics, Krzywoustego 2, 44-100, Gliwice, Poland

Publication date: 1999-07-01

• In this: publication
• By this: publisher
• In this Subject: Mechanics
• By this author: Krol A. ;  Szuber J. ;  Kaszczyszyn S.

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