Vacuum pressure thermal thin-film sensor

Authors: Berlicki T.M.; Osadnik S.J.; Prociow E.L.

Source: Vacuum, Volume 53, Number 3, June 1999 , pp. 373-376(4)

Publisher: Elsevier

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Language: English

Document Type: Research article

DOI: 10.1016/S0042-207X(98)00343-1

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