HREM and nanoindentation studies of BN:C films deposited by reactive sputtering from a B4C target

Authors: Johansson M.P.; Sjostrom H.; Hultman L.

Source: Vacuum, Volume 53, Number 3, June 1999 , pp. 451-457(7)

Publisher: Elsevier

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Language: English

Document Type: Research article

DOI: 10.1016/S0042-207X(99)00109-8

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