My never-ending story towards XHV pressure measurements

Author: Watanabe F.

Source: Vacuum, Volume 53, Number 1, May 1999 , pp. 151-157(7)

Publisher: Elsevier

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Keywords: XHV; Ion gauge; X-ray limit; Hot cathode; ESD

Language: English

Document Type: Research article

DOI: http://dx.doi.org/10.1016/S0042-207X(98)00423-0

Affiliations: 1: Sukegawa Electric Co., Ltd., Tsukuba Laboratory, 2157-1 Kamiyokoba, Tsukuba, Ibaraki, Japan

Publication date: 1999-05-01

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