Vacuum

Accurate electrical measurements for in situ diagnosis of RF discharges in plasma CVD processes
pp. 1-5(5)
Authors: Viera G.; Costa J.; Compte F.J.; Garca-Sanz E.; Andujar J.L.; Bertran E.

Comparison of in situ optical reflectance and post-growth characterisation for quantitative composition and thickness determination of Al_xGa_1-xAs
pp. 7-10(4)
Authors: Jothilingam R.; Farrell T.; Joyce T.B.; Bullough T.J.; Goodhew P.J.

Optical emission spectroscopy of self-sustained magnetron sputtering
pp. 11-15(5)
Authors: Posadowski W.M.; Brudnik A.

Characterization of an inductively amplified magnetron plasma by glow discharge mass spectrometry
pp. 17-20(4)
Authors: Molle C.; Beauvois A.; Wautelet M.; Dauchot J.P.; Hecq M.

Ion energy distribution in ionized dc sputtering measured by an energy-resolved mass spectrometer
pp. 21-24(4)
Authors: Kusano E.; Kobayashi T.; Kashiwagi N.; Saitoh T.; Saiki S.; Nanto H.; Kinbara A.

Simulation of heavy ion energy distribution function in the cathode sheath of noble gas mixture glow discharge
pp. 25-27(3)
Authors: Bondarenko G.G.; Kristya V.I.

Application of magnetic neutral loop discharge plasma to SiO₂ etching process
pp. 29-32(4)
Authors: Chen W.; Hayashi T.; Itoh M.; Morikawa Y.; Sugita K.; Uchida T.

Computational analyses of a magnetron sputtering system with a ferrromagnetic target
pp. 33-36(4)
Authors: Kashiwagi M.; Ido S.

Preparation of argon-free refractory thin films using RF-DC coupled magnetron sputtering
pp. 37-39(3)
Authors: Petrov P.K.; Hollmann E.K.; Volpyas V.A.; Volpyas A.V.; Tanaka T.; Kawabata K.

Influence of He, Ne and Kr addition in reactive Ar/N₂ dc magnetron plasma on TiN deposition
pp. 41-45(5)
Authors: Braic M.; Zoita C.N.; Braic V.; Kiss A.; Popescu M.; Musa G.

Preparation of thermosensitive magnetron sputtered thin films
pp. 47-52(6)
Authors: Beensh-Marchwicka G.; Prociow E.; Posadowski W.

Composition, chemical bonding and mechanical properties of magnetron sputtered CN_x thin films at different substrate bias
pp. 53-56(4)
Authors: Gioti M.; Logothetidis S.; Charitidis C.; Lefakis H.

Tribological properties of PVD titanium carbides
pp. 57-60(4)
Authors: Pancielejko M.; Precht W.; Czyzniewski A.

A new process for the development of hard and stable sputtered amorphous carbon films
pp. 61-65(5)
Authors: Logothetidis S.; Gioti M.; Charitidis C.; Patsalas P.

Calculation of weld parameters and thermal efficiency in electron beam welding
pp. 67-70(4)
Authors: Koleva E.; Mladenov G.; Vutova K.

The perfection of tungsten single crystals grown from the melt and solid state
pp. 71-74(4)
Authors: Glebovsky V.G.; Semenov V.N.

Study of vacuum levels in the annealing of high silicon (6.4wt%) non-oriented magnetic steel sheets obtained by rapid quenching and its incidence on grain size, texture and core losses
pp. 75-78(4)
Authors: Ibarrondo I.; Degauque J.

XPS-studies of structure transformation and relaxation processes in transition metal melts
pp. 79-82(4)
Authors: Kholzakov A.V.; Shabanova I.N.; Ponomarev A.G.

Growth and characterization of monocrystalline tungsten substrates
pp. 83-86(4)
Authors: Ermolov S.N.; Cortenraad R.; Semenov V.N.; Denier van der Gon A.W.; Bozhko S.I.; Brongersma H.H.; Glebovsky V.G.

Computer simulation of the heat transfer during electron beam melting and refining
pp. 87-91(5)
Authors: Vutova K.; Mladenov G.

Ultra-purification of iron by ultra-high vacuum melting
pp. 93-96(4)
Authors: Abiko K.; Takaki S.

Ultra-purification of iron by three types of melting furnaces constructed using ultra-high vacuum technology
pp. 97-100(4)
Authors: Takaki S.; Abiko K.

Disassembling and materials recovering process of alkaline manganese dry batteries by vacuum-aided recycling systems technology (VARS Tech.)
pp. 101-104(4)
Authors: Saotome Y.; Nakazawa Y.; Yamada Y.

Ultrapurification of yttrium metal from oxide to single crystal: results and perspectives
pp. 105-108(4)
Authors: Volkov V.T.; Ionov A.M.; Nikiforova T.V.

Structure and tribological properties of carbon and carbon nitride films, obtained by the ARC method
pp. 109-112(4)
Authors: Precht W.; Pancielejko M.; Czyzniewski A.

Microstructure and mechanical properties of multilayer TiB₂/C and co-sputtered TiB₂-C coatings for cutting tools
pp. 113-116(4)
Authors: Baker M.A.; Gilmore R.; Lenardi C.; Gibson P.N.; Gissler W.

Corrosion performance of CrN/NbN superlattice coatings deposited by the combined cathodic arc/unbalanced magnetron technique
pp. 117-121(5)
Authors: Tomlinson M.; Lyon S.B.; Hovsepian P.; Munz W.-D.

Tribological investigation of TiAlCrN and TiAlN/CrN coatings grown by combined steered-arc/unbalanced magnetron deposition
pp. 123-126(4)
Authors: Luo Q.; Rainforth W.M.; Donohue L.A.; Wadsworth I.; Munz W.-D.

Oxidation behaviour of TiAlN coatings sputtered at low temperature
pp. 127-131(5)
Authors: Panjan P.; Navinsek B.; Cekada M.; Zalar A.

Impulse irradiation plasma technology for film deposition
pp. 133-136(4)
Authors: Fetisov I.K.; Filippov A.A.; Khodachenko G.V.; Mozgrin D.V.; Pisarev A.A.

The ultimate vacuum
pp. 137-149(13)
Author: Redhead P.A.

My never-ending story towards XHV pressure measurements
pp. 151-157(7)
Author: Watanabe F.

A discussion of methods for the estimation of volumetric ratios determined by multiple expansions
pp. 159-162(4)
Authors: Redgrave F.J.; Forbes A.B.; Harris P.M.

Influence of orifice geometry on the simplification of transmission probability calculations
pp. 163-166(4)
Authors: Butler B.P.; Music V.; Redgrave F.J.

Dependence of sensitivity coefficient of a nude-type Bayard-Alpert gauge on the diameter of an envelope
pp. 177-180(4)
Authors: Suginuma S.; Hirata M.

Gas flow measurement by means of orifices and Venturi tubes
pp. 181-185(5)
Authors: Jitschin W.; Ronzheimer M.; Khodabakhshi S.

Two dynamic comparison methods for calibrating the rate of pressure leaks
pp. 187-191(5)
Authors: Yang M.; Dixin Z.; Shiliang L.; Yueli G.; Detian L.

Influence of the vacuum chamber shape on the non-uniformity of gas distribution
pp. 193-196(4)
Authors: Nesterov S.B.; Vassiliev Y.K.; Kryukov A.P.

Residual gas: traditional understanding and new experimental results
pp. 197-201(5)
Author: Fremerey J.K.

Performance improvements for a miniature quadrupole with a micromachined mass filter
pp. 203-206(4)
Authors: Taylor S.; Tunstall J.J.; Leck J.H.; Tindall R.F.; Jullien J.P.; Batey J.; Syms R.R.A.; Tate T.; Ahmad M.M.

Spatial mapping in the electron-impact ion-source of a residual gas analyser
pp. 207-210(4)
Authors: Holst B.; Buckland J.R.; Allison W.

Application of a static magnetic field to the mass filter of a quadrupole mass spectrometer
pp. 211-213(3)
Authors: Tunstall J.J.; Taylor S.; Vourdas A.; Leck J.H.; Batey J.

Developments in helium leak detection at JET
pp. 215-217(3)
Authors: Bryan S.; Hemmerich J.L.; Winkel T.

A novel route to extreme vacua: the non-evaporable getter thin film coatings
pp. 219-225(7)
Authors: Benvenuti C.; Cazeneuve J.M.; Chiggiato P.; Cicoira F.; Escudeiro Santana A.; Johanek V.; Ruzinov V.; Fraxedas J.

Flow investigation of Siegbahn vacuum pump by CFD methodology
pp. 227-231(5)
Authors: Cheng H.-P.; Jou R.-Y.; Chen F.-Z.; Chang Y.-W.; Iwane M.; Hanaoka T.

Experimental verification of theory for the pumping mechanism of a dry-scroll vacuum pump
pp. 233-237(5)
Authors: Sawada T.; Kamada S.; Sugiyama W.; Takemoto J.-i.; Haga S.; Tsuchiya M.

Development of a relative method for comparing the composition of the residual atmosphere above commercial dry-pump systems
pp. 239-242(4)
Author: Davis R.P.

The measurement of helium retention in forepumps
pp. 243-246(4)
Author: Chew A.D.

Origin of possible contamination introduced by a turbomolecular pumping system
pp. 247-251(5)
Authors: Bojon J.P.; Hilleret N.; Weiss K.

Sticking coefficients for helium and helium-containing mixtures at activated carbon under liquid helium cooling conditions
pp. 253-256(4)
Authors: Day C.; Schwenk-Ferrero A.

Solution for pressure measurement problems in finding PCT equilibrium characteristics of hydrogen getters
pp. 257-262(6)
Authors: De Angeli M.; Ghezzi F.

How the sorbent microgeometry effects the sorptional characteristics of cryopumps
pp. 263-267(5)
Authors: Nesterov S.B.; Vassiliev Y.K.; Saksaganski G.L.; Loginov B.A.; Protasenko V.V.

A study of the photodesorption process for cryosorbed layers of H₂, CH₄, CO or CO₂ at various temperatures between 3 and 68K
pp. 269-272(4)
Authors: Anashin V.V.; Malyshev O.B.; Calder R.; Grobner O.

VUV synchrotron radiation studies of candidate LHC vacuum chamber materials
pp. 273-276(4)
Authors: Cimino R.; Baglin V.; Collins I.R.

A study of thermal treatment procedures to reduce hydrogen outgassing rate in thin wall stainless steel cells
pp. 277-280(4)
Authors: Nemanic V.; Setina J.

Decrease of water vapor desorption by Si film coating on stainless steel
pp. 281-284(4)
Authors: Inayoshi S.S.; Tsukahara S.; Kinbara A.

Reduction of water outgassing and UHV production in an unbaked vacuum chamber by neon gas discharge
pp. 285-289(5)
Authors: Akaishi K.; Ezaki K.; Kubota Y.; Motojima O.

Measurement of outgassing characteristics from a vacuum chamber fabricated for pressure calibration in UHV/XHV region
pp. 291-294(4)
Authors: Ichimura S.; Kokubun K.; Hirata M.; Tsukahara S.; Saito K.; Ikeda Y.

Outgassing of stainless steel during sliding friction in ultra-high vacuum
pp. 295-298(4)
Authors: Nevshupa R.A.; de Segovia J.L.; Deulin E.A.

Outgassing stimulated by deformation
pp. 299-302(4)
Authors: Repa P.; Oralek D.

The outgassing from TiN and BN films grown on stainless steel by IBAD
pp. 303-307(5)
Authors: Chung K.H.; Lee S.K.; Shin Y.H.; Lim J.Y.; Hong S.S.; Be S.H.

Gas desorption properties of tungsten coated graphite materials
pp. 309-312(4)
Authors: Hirohata Y.; Okegawa M.; Yanagihara H.; Hino T.; Ogiwara N.; Yagyu J.; Saidoh M.

Permeation of gases through polymer membranes investigated by mass spectroscopy
pp. 313-315(3)
Authors: Norenberg H.; Miyamoto T.; Fukugami N.; Tsukahara Y.; Smith G.D.W.; Briggs G.A.D.

Surface cleaning efficiency measurements for UHV applications
pp. 317-320(4)
Authors: Benvenuti C.; Canil G.; Chiggiato P.; Collin P.; Cosso R.; Guerin J.; Ilie S.; Latorre D.; Neil K.S.

Experiment on removing hydrocarbon by using RF oxygen or hydrogen plasma
pp. 321-324(4)
Authors: Tada S.; Sakamoto Y.; Suzuki T.; Saito H.; Oikawa M.; Kidokoro A.; Enoki H.

Chemical polishing of stainless steel for ultrahigh vacuum wall material
pp. 325-328(4)
Authors: Inayoshi S.S.; Sato Y.; Saito K.; Tsukahara S.; Hara Y.; Amano S.; Ishizawa K.; Nomura T.; Shimada A.; Kanazawa M.

Measurements of particulate contamination and migration under vacuum using a large sensitive area particle counter
pp. 329-333(5)
Authors: Jimenez J.M.; Dorier J.L.; Hilleret N.

Two mechanisms of formation of a dust in vacuum chambers
pp. 335-338(4)
Authors: Bochkarev A.A.; Poliakova V.I.; Pukhovoy M.V.

Safe handling of corrosive chemicals in a vacuum environment: a case study - photoelectron spectroscopy of reactive intermediates
pp. 339-345(7)
Authors: Morris A.; Dyke J.M.

RHIC vacuum systems
pp. 347-352(6)
Authors: Hseuh H.C.; Davis R.; Pate D.; Smart L.; Todd R.; Weiss D.

Vacuum system of the 300m gravitational wave laser interferometer in Japan (TAMA300)
pp. 353-356(4)
Authors: Saito Y.; Ogawa Y.; Horikoshi G.; Matuda N.; Takahashi R.; Fukushima M.

The JET vacuum interspace system
pp. 357-361(5)
Authors: Orchard J.C.; Scales S.C.

Antiabrasive coatings in a new application-wood rotary peeling process
pp. 363-366(4)
Authors: Beer P.; Djouadi M.A.; Marchal R.; Sokolowska A.; Lambertin M.; Czyzniewski A.; Precht W.