RF plasma cleaning of the oxide surface as a possibility for contamination control in mos structures
Authors: Alexandrova, S.; Szekeres, A.
Source: Vacuum, Volume 51, Number 3, 1 November 1998 , pp. 469-472(4)
Document Type: Research Article
Affiliations: Institute of Solid State Physics, Bulgarian Academy of Sciences, 72 Tzarigradsko Chaussee, 1784, Sofia, Bulgaria
Publication date: November 1, 1998