Authors: Hotovy, I.; Huran, J.; Janik, J.; Kobzev, A.P.
Source: Vacuum, Volume 51, Number 2, October 1998, pp. 157-160(4)
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Document Type: Research Article
Department of Microelectronics Slovak University of Technology Ilkovi 812 19, Bratislava, Slovakia
Publication date: October 1, 1998