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Patterning of cantilevers for power sensor microsystem

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Document Type: Research Article

DOI: http://dx.doi.org/10.1016/S0042-207X(98)00181-X

Affiliations: Institute of Electrical Engineering, Slovak Academy of Sciences, Dubravska cesta 9, 842 39, Bratislava, Slovakia

Publication date: October 1, 1998

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