The dynamics of recrystallization and melting of implanted silicon at irradiation by powerful light pulses
Authors: Fattakhov, Y.V.; Galyautdinov, M.F.; Lvova, T.N.; Khaibullin, I.B.
Source: Vacuum, Volume 51, Number 2, October 1998 , pp. 255-259(5)
Document Type: Research Article
Affiliations: Kazan Physical-Technical Institute of the Russian Academy of Sciences, Sibirsky Trakt 10\7, Kazan 420029, Tatarstan, , Russia
Publication date: October 1, 1998