Properties of thin films of magnetic materials produced from DC Magnetron sputtering; The effects of substrate bias and the partial pressure of reactive gases
Authors: Zhang H.-W.; Yang, S.Q.
Source: Vacuum, Volume 46, Number 7, July 1995 , pp. 661-666(6)
Document Type: Research Article
Affiliations: Department of Materials and Information, University of Electric Science and Technology, Chengdu, Sichuan 610054, China
Publication date: July 1, 1995