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Authors: Kononenko, O.V.; Matveev, V.N.; Kislov, N.A.; Khodos, I.I.; Kasumov, A.Y.
Document Type: Research Article
Affiliations: Institute of Microelectronics Technology and High Purity Materials, Russian Academy of Sciences, Chernogolovka 142432, Moscow Dist., Russian Federation
Publication date: July 1, 1995