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Crystallisation and electrical resistivity of sputter-deposited aluminium-germanium alloy films

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Keywords: Aluminium-germanium alloys; Crystallization; Electrical properties and measurements

Document Type: Correspondence

DOI: http://dx.doi.org/10.1016/S0040-6090(01)01640-6

Affiliations: Philips Research, Prof. Holstlaan 4, 5656 AA , Eindhoven, The Netherlands

Publication date: December 17, 2001

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