Authors: Francke E.; Morvan D.; Amouroux J.1; Avni R.; Nickel H.; Miralai S.F.
Source: Thin Solid Films, Volume 303, Number 1, 15 July 1997 , pp. 17-26(10)
Publisher: Elsevier
Keywords: Ceramics; Glow discharge mass spectroscopy (GDMS); Glow discharge optical spectroscopy (GDOS)
Language: English
Document Type: Research article
DOI: 10.1016/S0040-6090(97)00043-6
Affiliations: 1: ENSCP, Laboratoire de Genie des Procedes Plasmas, 11 rue Pierre et Marie Curie, F-75231 Paris, France
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