Carbon films with high density nanotubes produced using microwave plasma assisted CVD

Authors: Zhang Q.; Yoon S.F.; Ahn J.; Gan B.; Rusli; Yu M.-B.

Source: Journal of Physics and Chemistry of Solids, Volume 61, Number 7, July 2000 , pp. 1179-1183(5)

Publisher: Elsevier

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Keywords: Microstructure; PECVD; Raman effect; SEM; XRD

Language: English

Document Type: Research article

DOI: http://dx.doi.org/10.1016/S0022-3697(99)00383-2

Publication date: 2000-07-01

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