Role of high activation energy homogeneous chemical reactions in affecting CVD-rates and deposit quality for heated surfaces

This article is hosted on another website.

You may be required to register, activate a subscription or purchase the article before you can obtain the full text.


Download / Buy Article:

Keywords: Chemical vapor deposition; Soret-modified Fick diffusion; chemical reaction engineering; chemical sublayer theory; mass transport in nonisothermal systems; reacting boundary layer theory

Document Type: Research Article


Affiliations: Department of Chemical Engineering, High Temperature Chemical Reaction Engineering Laboratory, Yale University, New Haven, CT 06520-8286, U.S.A.

Publication date: December 1, 1996

Related content



Share Content

Access Key

Free Content
Free content
New Content
New content
Open Access Content
Open access content
Subscribed Content
Subscribed content
Free Trial Content
Free trial content
Cookie Policy
Cookie Policy
ingentaconnect website makes use of cookies so as to keep track of data that you have filled in. I am Happy with this Find out more