Role of high activation energy homogeneous chemical reactions in affecting CVD-rates and deposit quality for heated surfaces

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Keywords: Chemical vapor deposition; Soret-modified Fick diffusion; chemical reaction engineering; chemical sublayer theory; mass transport in nonisothermal systems; reacting boundary layer theory

Document Type: Research Article

DOI: http://dx.doi.org/10.1016/S0009-2509(96)00336-3

Affiliations: Department of Chemical Engineering, High Temperature Chemical Reaction Engineering Laboratory, Yale University, New Haven, CT 06520-8286, U.S.A.

Publication date: December 1, 1996

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