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Acoustic Fields in Trapezoidal Cavities

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In recent years the growing demand for miniaturised transducers and sensors, and the widespread use of silicon technology, has focused interest on the design of devices on silicon chips. Usually at the heart of these devices is a small, fluid-filled cavity whose characteristics, such as its geometry and dimensions, are unavoidably determined by the crystallographic properties of silicon and the etching process. To be precise, these physical processes determine that the cavity be trapezoidal having an angle between adjacent walls close to 55°.

We discuss some aspects of the problems which arise when designing on silicon and present analytical and experimental results concerning the properties of acoustic fields in trapezoidal cavities.

Document Type: Research Article

Publication date: January 1, 1997

More about this publication?
  • Acta Acustica united with Acustica, published together with the European Acoustics Association (EAA), is an international, peer-reviewed journal on acoustics. It publishes original articles on all subjects in the field of acoustics, such as general linear acoustics, nonlinear acoustics, macrosonics, flow acoustics, atmospheric sound, underwater sound, ultrasonics, physical acoustics, structural acoustics, noise control, active control, environmental noise, building acoustics, room acoustics, acoustic materials, acoustic signal processing, computational and numerical acoustics, hearing, audiology and psychoacoustics, speech, musical acoustics, electroacoustics, auditory quality of systems. It reports on original scientific research in acoustics and on engineering applications. The journal considers scientific papers, technical and applied papers, book reviews, short communications, doctoral thesis abstracts, etc. In irregular intervals also special issues and review articles are published.
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