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Open Access Effect of Annealing on Microstructure and Properties of ZnO Thin Films Deposited on Glass Surface

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ZnO thin films were prepared by a ultrasonic spray pyrolysis (USP) method on soda-lime-silica float glass substrate at the deposition temperature of 500 with zinc nitrate as a precursor. The ZnO thin films were annealed at different temperatures (500, 550, 600 ) and durations (30, 60, 120 min), respectively. Influence of annealing condition on the microstructure, morphology and optical properties of the films was investigated. The results indicate that the annealing treatment improves the quality of the ZnO film and increases the c-axis orientation. The adhesion strength of the ZnO film increases with the extension of the annealing duration, however, the c-axis orientation degree first increases and then decreases at 120 min. The c-axis orientation and the visible light transmittance firstly increase and then decrease with the increase of annealing temperature. The film obtained at the optimum annealing temperature of 500 and the duration of 60 min has a good crystallization quality, uniform crystal size and dense smooth surface, giving the improved optical properties. The visible light transmittance increases from 70% to 90% after annealing treatment.

Document Type: Research Article


Affiliations: School of Textile and Material Engineering, Dalian Polytechnic University, Dalian 116034, Liaoning, China

Publication date: June 1, 2013

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  • Journal of the Chinese Ceramic Society (JCCS), published in Chinese and in English, is a comprehensive monthly periodical focused on the fields of inorganic and non-metallic materials. The main purpose of the JCCS is to report the latest creative achievements in research, production and design for ceramics, glass, cementing materials, refractory, artificial crystals and other non-metallic materials. JCCS is regarded as an important journal in inorganic and non-metallic materials sciences in China and has been awarded by China Association for Science and Technology. The full-text of papers in JCCS is also published by CNKI (China National Knowledge Infrastructure). JCCS is indexed in EI Compendex, CA( Chemical Abstracts) ,SA and Ж and more than 20 databases.
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