Electrical Properties and Annealing Behavior of Nitrogen Doped 6H-SiC Crystals Irradiated by Heavy Neutron
Abstract:Nitrogen doped 6H-SiC single crystals were irradiated by whole spectral neutrons with a fluence of 1.67 × 1020 n/cm2 at 60–80 . The specimens were isochronally annealed from room temperature to 1 600 . The influences of irradiation and annealing on the electrical properties of the sample were investigated. The massive defects and damages in the sample are induced by the irradiation, resulting in the enormous increase of the resistivity and the decreases of dielectric constant and dielectric loss. The results show that there are two characteristic temperatures in the evolution process of defects and electric properties on the annealing, i.e., 1 000 and 1 400 , respectively. At the annealing temperature of < 1 000 , the resistivity of irradiated sample slightly increases, while the dielectric constant and the dielectric loss decrease with the increase of annealing temperature. At the annealing temperature of > 1 000 , the resistivity decreases. The resistivity decreases, but the dielectric constant and the dielectric loss increase at the annealing temperature of > 1 400 . These phenomena could be explained through an irradiation damage model based on that the interstitial atoms and vacancies are dominating defects in the irradiated crystal. Also, the dielectric constant of nitrogen doped 6H-SiC is 3.5 × 104. This peculiar property is mainly formed due to the electronic long range migration polarization.
Document Type: Research Article
Publication date: June 1, 2013
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- Journal of the Chinese Ceramic Society (JCCS), published in Chinese and in English, is a comprehensive monthly periodical focused on the fields of inorganic and non-metallic materials. The main purpose of the JCCS is to report the latest creative achievements in research, production and design for ceramics, glass, cementing materials, refractory, artificial crystals and other non-metallic materials. JCCS is regarded as an important journal in inorganic and non-metallic materials sciences in China and has been awarded by China Association for Science and Technology. The full-text of papers in JCCS is also published by CNKI (China National Knowledge Infrastructure). JCCS is indexed in EI Compendex, CA( Chemical Abstracts) ,SA and Ж and more than 20 databases.
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