Real-time image quality assessment with mixed Lagrange time delay estimation autoregressive (MLTDEAR) model

Authors: SIM, K. S.; TSO, C. P.; TAN, Y. Y.; LIM, W. K.

Source: Journal of Microscopy, Volume 226, Number 3, June 2007 , pp. 230-243(14)

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Abstract:

Summary

A proposal to assess the quality of scanning electron microscope images using mixed Lagrange time delay estimation technique is presented. With optimal scanning electron microscope scan rate information, online images can be quantified and improved. The online quality assessment technique is embedded onto a scanning electron microscope frame grabber card for real-time image processing. Different images are captured using scanning electron microscope and a database is built to optimally choose filter parameters. An optimum choice of filter parameters is obtained. With the optimum choice of scan rate, noise can be removed from real-time scanning electron microscope images without causing any sample contamination or increasing scanning time.

Keywords: Autoregressive model; averaging; quality assessment; scanning electron microscope; signal-to-noise ratio; time delay

Document Type: Research article

DOI: http://dx.doi.org/10.1111/j.1365-2818.2007.01770.x

Affiliations: 1: Faculty of Engineering & Technology, Multimedia University, Melaka, Malaysia

Publication date: 2007-06-01