Application of the dual-beam FIB/SEM to metals research

Authors: SIVEL, V. G. M.; VAN DEN BRAND, J.¹; WANG, W. R.²; MOHDADI, H.²; TICHELAAR, F. D.²; ALKEMADE, P. F. A.²; ZANDBERGEN, H. W.²

Source: Journal of Microscopy, Volume 214, Number 3, June 2004 , pp. 237-245(9)

Publisher: Wiley-Blackwell

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Abstract:

Summary

The dual-beam microscope is a combination of a focused ion beam with an electron beam. The instrument used in this work is also equipped with an energy-dispersive X-ray system for local elemental analysis. This powerful tool gives access to specific features inside a material. Two different applications are presented in this paper: (1) cross-sections and transmission electron microscope specimens cut in order to investigate the interface between an aluminium substrate and its epoxy coating; and (2) a grain boundary in a Cu₃Au alloy. In both cases, the dual beam succeeded where other methods failed.

Keywords: Adhesion; aluminium; coating; focused ion beam; grain boundary; pseudoboehmite; TEM preparation

Document Type: Research article

DOI: http://dx.doi.org/10.1111/j.0022-2720.2004.01329.x

Affiliations: 1: Netherlands Institute for Metals Research, Rotterdamseweg 137, 2628 AL Delft, The Netherlands 2: National Centre for High Resolution Electron Microscopy, Department of Materials Science and Technology, Delft University of Technology, Rotterdamseweg 137, 2628 AL Delft, The Netherlands

Publication date: 2004-06-01