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Local Crystallization of Noncrystallized PbTiO3 Thin Film by a Heated Atomic Force Microscope Tip

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We report locally crystallized ferroelectric nanodots in a noncrystallized PbTiO3 thin film with a thickness of about 50 nm. A sol PbTiO3 thin film was deposited on a Pt/TiO2/SiO2/Si substrate by a spin coating process. To form a noncrystallized PbTiO3 thin film, the sol PbTiO3 thin film was annealed at 450°C for 1 h. Locally crystallized nanodots were formed by the local crystallization process using an atomic force microscopy tip heated to 700°C. We adjusted the diverse diameters of locally crystallized PbTiO3 nanodots in the range from 200 to 400 nm by controlling the local heating times.
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Document Type: Research Article

Publication date: 2012-05-01

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