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Single layer air co‐fired capacitors with Pt internal electrodes were prototyped for the compositions 0.8CaTiO3–0.2CaHfO3 (CHT)
and 0.5 mol% Mn‐doped 0.8CaTiO3–0.2CaHfO3 (CHT + Mn) to yield a material
with a room‐temperature relative permittivity of εr ~170, thermal coefficient of capacitance (TCC) of ±15.8% to ±16.4% from −50°C to 150°C, and a band gap of ~4.0 eV. Impedance spectroscopy revealed that doping with
Mn reduces both the ionic and electronic conductivity. Undoped CHT single layer capacitors exhibited ambient energy densities as large as 9.0 J/cm3, but showed a drastic decrease in energy density
above 100°C. When doped with 0.5 mol% Mn, the temperature dependence of the breakdown strength was minimized, and energy densities similar to ambient values (9.5 J/cm3) were observed up to 200°C. At 300°C, energy densities
as large as 6.5 J/cm3 were measured. The design rationale for these dielectrics centered on materials with large band gaps, linear or weakly nonlinear permittivities, and high breakdown strengths. These observations suggest that with further reductions in grain size and dielectric
layer thickness, the CaTiO3–CaHfO3 system is a strong candidate for integration into future power electronics applications.