Processing Optimization of Lead Magnesium Niobate‐Lead Titanate Thin Films for Piezoelectric
We report processing conditions and electromechanical properties of highly textured, 0.7
( Pb 1/3 Mg 2/3) Nb 3–0.3 O 3
( PbTiO ) films, processed via chemical solution deposition on platinized silicon substrates. Textured perovskite seed layers, optimization of heat treatment conditions and PMN–PT content control were studied
to obtain pure perovskite Pb films with dense, columnar grains. Highly (100)‐ and (111)‐oriented films, with Lotgering factors between 91% and 97%, and average grain size up to ~430 nm were synthesized on thin PMN–PT 3
and PbTiO ( Pb , Zr ) Ti 3 seed layers. Overall, (100)‐textured films showed higher dielectric permittivity and saturated
33,f piezoelectric coefficients. Dense, submicron‐thick, (100)‐oriented films showed low‐field, relative dielectric permittivity of up to ~2850 (tan δ = 0.02) at 1 kHz, and remnant polarization values up to 17.5 μC/cm2.
The films showed saturated d
33,f piezoelectric coefficients as high as 210 pm/V.
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Document Type: Research Article
Publication date: 2012-04-01