Skip to main content

Processing Optimization of Lead Magnesium Niobate‐Lead Titanate Thin Films for Piezoelectric MEMS Application

Buy Article:

$51.00 plus tax (Refund Policy)


We report processing conditions and electromechanical properties of highly textured, 0.7Pb(Mg1/3Nb2/3)O3–0.3PbTiO3 (PMN–PT) films, processed via chemical solution deposition on platinized silicon substrates. Textured perovskite seed layers, optimization of heat treatment conditions and Pb content control were studied to obtain pure perovskite PMN–PT films with dense, columnar grains. Highly (100)‐ and (111)‐oriented films, with Lotgering factors between 91% and 97%, and average grain size up to ~430 nm were synthesized on thin PbTiO3 and Pb(Zr,Ti)O3 seed layers. Overall, (100)‐textured films showed higher dielectric permittivity and saturated d 33,f piezoelectric coefficients. Dense, submicron‐thick, (100)‐oriented films showed low‐field, relative dielectric permittivity of up to ~2850 (tan δ = 0.02) at 1 kHz, and remnant polarization values up to 17.5 μC/cm2. The films showed saturated d 33,f piezoelectric coefficients as high as 210 pm/V.

Document Type: Research Article


Publication date: April 1, 2012

Access Key

Free Content
Free content
New Content
New content
Open Access Content
Open access content
Partial Open Access Content
Partial Open access content
Subscribed Content
Subscribed content
Free Trial Content
Free trial content
Cookie Policy
Cookie Policy
Ingenta Connect website makes use of cookies so as to keep track of data that you have filled in. I am Happy with this Find out more