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Orientation and Phase Relationships between Titania Films and Polycrystalline BaTiO3 Substrates as Determined by Electron Backscatter Diffraction Mapping

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Titania films have been grown on polycrystalline BaTiO3 (BTO) substrates at 700°C by pulsed laser deposition. Electron backscatter diffraction (EBSD) was used to determine grain orientations in the substrate before growth, and the phase and orientation of the supported films after growth. All BaTiO3 grains within 26° of (001) were covered by anatase films with an orientation relationship of (001)Anatase||(001)BTO and [100]Anatase||[100]BTO. Rutile with a variety of orientations grew on BaTiO3 grains with orientations closer to (110) and (111). EBSD mapping provides an efficient means for determining phase and orientation relationships of films over all orientation parameters.

Document Type: Research Article


Affiliations: Department of Materials Science and Engineering, Carnegie Mellon University, Pittsburgh, Pennsylvania 15213-3890

Publication date: September 1, 2010


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