Preparation and Sintering Behavior of the Tin-Doped Indium Oxide Nanopowders
Abstract:Tin-doped indium oxide (ITO) nanopowders with 90±3 and 40±3 nm particle size were prepared by the urea-based hydrothermal under a low-pressure method. The sintering behavior of the as-prepared ITO powder was studied at temperature from 1200° to 1500°C. The sintered ITO targets with large dimensions of 500 mm × 300 mm × 6 mm made from the as-prepared 90 and 40 nm powders with w90 nm:w40 nm=70:30 had high density (99.7% of the theoretical density) and low specific electrical resistivity (120 Ω·cm). The as-prepared powders were favorable to commercial fabrication of the high-density ITO targets.
Document Type: Research Article
Affiliations: 1: School of Chemistry and Materials Science, Shaanxi Normal University, Xian 710062, China 2: School of Materials Science and Engineering, Guilin University of Electronic Technology, Guilin 541004, China 3: School of Materials Science and Engineering, University of New South Wales, Sydney, New South Wales 2052, Australia
Publication date: 2010-09-01