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(100) Three-Axis-Oriented BaTiO3 Thin Film with BaZrO3 Buffer Layer on MgO(100) Prepared by Chemical Solution Deposition Method

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Abstract:

(100) three-axis-oriented BaTiO3 thin film with BaZrO3 buffer layer was prepared on an MgO(100) substrate by the chemical solution deposition method. The epitaxial growth of the (100) BaTiO3 layer was enabled by inducing a BaZrO3 bottom layer. Transmission electron microscopy revealed cube-on-cube epitaxial growth. The BaTiO3 thin film exhibited a (100) three-axis-orientation that followed the (100) orientation of the MgO substrate and the (100) orientation of the BaZrO3 bottom layer, as observed from an X-ray pole figure measurement and the selected area electron diffraction patterns.

Document Type: Research Article

DOI: https://doi.org/10.1111/j.1551-2916.2009.03465.x

Affiliations: 1Murata Manufacturing Co. Ltd. 10-1, Nagaokakyo-shi, Kyoto 617-8555, Japan

Publication date: 2010-03-01

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