Skip to main content

Perfectly (001)- and (111)-Oriented (Ba,Sr)TiO3 Thin Films Sputtered on Pt/TiOx/SiO2/Si Without Buffer Layers

Buy Article:

$51.00 plus tax (Refund Policy)


We report the growth of (001)- and (111)-oriented (Ba,Sr)TiO3 (BST) films on Pt/TiOx/SiO2/Si substrates by RF magnetron sputtering without buffer layers. Interestingly, it was observed that the crystallographic orientation of prepared films strongly depended on O2/(Ar+O2) mixed ratios (OMR) during deposition. The samples with OMR=0% showed a perfect (001) orientation, while those with OMR ranging from 10% to 50% showed a preferential (111) orientation. The perfectly (111)-oriented BST film deposited with OMR=30% exhibited a broader grain size distribution than the (001) textured BST film. At ±400 kV/cm, high tunability of 52% and 68% can be achieved for (001)- and (111)-oriented BST films, respectively.

Document Type: Research Article


Affiliations: 1: Shanghai Institute of Ceramics, Chinese Academy of Sciences, Shanghai 200050, China 2: IEMN-DOAE-MIMM Team, UMR CNRS 8520, Bat. P3, Cité Scientifique, Villeneuve d'Ascq, 59655 Lille, France

Publication date: February 1, 2010


Access Key

Free Content
Free content
New Content
New content
Open Access Content
Open access content
Subscribed Content
Subscribed content
Free Trial Content
Free trial content
Cookie Policy
Cookie Policy
Ingenta Connect website makes use of cookies so as to keep track of data that you have filled in. I am Happy with this Find out more