Skip to main content

Microfabrication of U-Shaped Grooves on the Surface of BaO–TiO2–GeO2 Glass by YAG Laser Irradiation and Selective Chemical Etching

Buy Article:

$51.00 plus tax (Refund Policy)

Abstract:

A combination technique of Nd:YAG laser (wavelength: 1064 nm) irradiations and chemical etchings was applied to fabricate microsize U-shaped grooves on the surface of CuO-doped BaO–TiO2–GeO2 glass, and chemical etching behaviors were examined by using a confocal scanning laser microscope. Continuous-wave Nd:YAG lasers with a power of 0.7–0.8 W were irradiated onto the glass surface and scanned at a speed of 10 m/s, inducing structural modified lines with refractive index changes. The chemical etching rates for the refractive index changed lines in a nitric acid solution (1N HNO3) were larger than those for the base glass (nonirradiated part). The etching profile was changed gradually from W-shaped to U-shaped grooves with increasing etching time. The sharp bending lines with an angle of 150° and the cross-linked lines were also smoothly etched. The U-shaped grooves with a surface covered by nonlinear optical Ba2TiGe2O8 crystals were formed by the crystallization of etched samples. This study proposes that the patterning of microchannels with optical functional surfaces is possible on the glass surface using the present technique.

Document Type: Research Article

DOI: https://doi.org/10.1111/j.1551-2916.2008.02452.x

Affiliations: 1: Department of Materials Science and Technology, Nagaoka University of Technology, Nagaoka 940-2188, Japan 2: Department of Material and Energy Science, Graduate School of Environmental Science, Okayama University, Okayama 700-8530, Japan

Publication date: 2008-07-01

  • Access Key
  • Free ContentFree content
  • Partial Free ContentPartial Free content
  • New ContentNew content
  • Open Access ContentOpen access content
  • Partial Open Access ContentPartial Open access content
  • Subscribed ContentSubscribed content
  • Partial Subscribed ContentPartial Subscribed content
  • Free Trial ContentFree trial content
Cookie Policy
X
Cookie Policy
Ingenta Connect website makes use of cookies so as to keep track of data that you have filled in. I am Happy with this Find out more