If you are experiencing problems downloading PDF or HTML fulltext, our helpdesk recommend clearing your browser cache and trying again. If you need help in clearing your cache, please click here . Still need help? Email help@ingentaconnect.com

Microfabrication of U-Shaped Grooves on the Surface of BaO–TiO2–GeO2 Glass by YAG Laser Irradiation and Selective Chemical Etching

$48.00 plus tax (Refund Policy)

Download / Buy Article:


A combination technique of Nd:YAG laser (wavelength: 1064 nm) irradiations and chemical etchings was applied to fabricate microsize U-shaped grooves on the surface of CuO-doped BaO–TiO2–GeO2 glass, and chemical etching behaviors were examined by using a confocal scanning laser microscope. Continuous-wave Nd:YAG lasers with a power of 0.7–0.8 W were irradiated onto the glass surface and scanned at a speed of 10 m/s, inducing structural modified lines with refractive index changes. The chemical etching rates for the refractive index changed lines in a nitric acid solution (1N HNO3) were larger than those for the base glass (nonirradiated part). The etching profile was changed gradually from W-shaped to U-shaped grooves with increasing etching time. The sharp bending lines with an angle of 150° and the cross-linked lines were also smoothly etched. The U-shaped grooves with a surface covered by nonlinear optical Ba2TiGe2O8 crystals were formed by the crystallization of etched samples. This study proposes that the patterning of microchannels with optical functional surfaces is possible on the glass surface using the present technique.

Document Type: Research Article

DOI: http://dx.doi.org/10.1111/j.1551-2916.2008.02452.x

Affiliations: 1: Department of Materials Science and Technology, Nagaoka University of Technology, Nagaoka 940-2188, Japan 2: Department of Material and Energy Science, Graduate School of Environmental Science, Okayama University, Okayama 700-8530, Japan

Publication date: July 1, 2008

Related content



Share Content

Access Key

Free Content
Free content
New Content
New content
Open Access Content
Open access content
Subscribed Content
Subscribed content
Free Trial Content
Free trial content
Cookie Policy
Cookie Policy
ingentaconnect website makes use of cookies so as to keep track of data that you have filled in. I am Happy with this Find out more