Fabrication of High Aspect Ratio Ferroelectric Microtubes by Vacuum Infiltration using Macroporous Silicon Templates

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Ordered arrays of high aspect ratio (>10:1) ferroelectric Pb(Zr0.52Ti0.48)O3 (PZT) tube structures were fabricated by vacuum infiltration of macroporous silicon (Si) templates. Improved phase purity was achieved when PZT microtubes were pyrolyzed at 300°C and partially released from the Si template to prevent a chemical reaction between the Pb and the Si during subsequent high-temperature crystallization. The free-standing microtubes were crystallized by rapid thermal annealing at 750°C for 1–3 min. Perovskite phase formation was confirmed by X-ray diffraction and transmission electron microscopy methods. Coaxial structures comprised of metallic LaNiO3, PZT, and Pd layers were also processed to enable future electrical characterization of the ferroelectric microtubes.

Document Type: Research Article

DOI: http://dx.doi.org/10.1111/j.1551-2916.2006.01123.x

Affiliations: 1: Materials Research Institute, The Pennsylvania State University, University Park, Pennsylvania 16802 2: Electrical Engineering Department, The Pennsylvania State University, University Park, Pennsylvania 16802 3: Philips Research Laboratories, Eindhoven, the Netherlands

Publication date: September 1, 2006

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