Controlled Thickness Deposition of Ultrathin Ceramic Films by Spin Coating

Authors: Leite, Edson Roberto; Lee, Eduardo Jian Hua; Ribeiro, Caue; Longo, Elson

Source: Journal of the American Ceramic Society, Volume 89, Number 6, June 2006 , pp. 2016-2020(5)

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Abstract:

This work describes the combined use of nanocrystal water-based colloidal suspensions with spin-coating deposition in order to obtain ultrathin ceramic films. We have used tin oxide (SnO₂) nanoparticles, with particle diameter sizes ranging from 1–5.5 nm, to develop the deposition approach. Films obtained under several conditions were characterized by ellipsometry and atomic force microscopy, showing that the process has the ability to produce ultrathin ceramic films, with thickness ranging from 10–100 nm, with good particle packing. Additionally, electrical measurements in the films indicate good homogeneity and potential for various applications.

Document Type: Research article

DOI: http://dx.doi.org/10.1111/j.1551-2916.2006.00992.x

Affiliations: 1: Department of Chemistry, Federal University of Sao Carlos-UFSCar, São Carlos 13560-905, SP, Brazil

Publication date: 2006-06-01