Preparation of Sputtered (Bax,Sr1−x)TiO3 Thin Films Directly on Copper

$48.00 plus tax (Refund Policy)

Download / Buy Article:


(Ba0.6,Sr0.4)TiO3 (BST) films were deposited on copper foils by radio frequency magnetron sputtering. By the use of controlled pO2 high-temperature anneals, the films were completely crystallized in the absence of substrate oxidation. X-ray diffraction and transmission electron microscopy (TEM) revealed an abrupt Cu/BST interface. The deposited BST films exhibit a zero bias permittivity and loss tangent values of 600 and 0.018, respectively. An electrical tunability ratio of 3.5:1 is observed on these metal–insulator–metal devices. Devices show leakage currents of 10−8 A/cm2 at ±10 V/m, and loss tangents as low as 0.003 in fields approaching 40 V/m.

Document Type: Research Article


Affiliations: Department of Materials Science and Engineering, The Electroceramic Thin Films Group, North Carolina State University, Raleigh, North Carolina 27695

Publication date: September 1, 2005

Related content



Share Content

Access Key

Free Content
Free content
New Content
New content
Open Access Content
Open access content
Subscribed Content
Subscribed content
Free Trial Content
Free trial content
Cookie Policy
Cookie Policy
ingentaconnect website makes use of cookies so as to keep track of data that you have filled in. I am Happy with this Find out more