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Synthesis of Nanostructured TiN Using a Two-Step Transition Metal Halide Approach

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A two-step transition metal halide approach has been developed for synthesizing uniform ultra-fine titanium nitride (TiN) nano-crystallites (<10 nm) at relatively low temperatures of 400°C. The nano-sized TiN crystallites were obtained by reacting liquid titanium tetrachloride dissolved in anhydrous chloroform with anhydrous NH3 gas at room temperature followed by heat treatment under ultra-high-purity Ar, N2, and anhydrous NH3 atmosphere. The synthesized TiN nano-crystallites were characterized by X-ray diffraction, Brunauer–Emmett–Teller, pycnometer, differential thermal analysis/thermo-gravimetric analysis, and high-resolution transmission electron microscopy. The effect of the heat treatment temperature and atmosphere (Ar, N2, and NH3) on the specific surface area, density, crystal structure, and composition is discussed.
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Document Type: Research Article

Affiliations: 1: Department of Materials Science and Engineering, Carnegie Mellon University, Pittsburgh, Pennsylvania 15213 2: Department of Materials Science and Engineering and Department of Biomedical Engineering, Carnegie Mellon University, Pittsburgh, Pennsylvania 15213

Publication date: 2005-08-01

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