Damage-Free and Short Annealing of Pb(Zr,Ti)O3 Thick Films Directly Deposited on Stainless Steel Sheet by Aerosol Deposition with CO2 Laser Radiation
Abstract:Pb(Zr,Ti)O3 (PZT) thick films directly deposited onto stainless steel (SS) sheets by the aerosol deposition method were annealed by CO2 laser (CL) radiation. The surface brilliance of the SS sheets was not influenced by thermal heating and the temperature of the reverse side of the film (i.e., the SS sheet) was measured at 150°C or less. The remanent polarization, coercive field values, and the dielectric constant are 27.8 C/cm2, 31.6 kV/cm, and 1366, respectively. The diffusion layer between the PZT and the SS sheet was minimized by the use of CL radiation compared with using an electric furnace.
Document Type: Research Article
Affiliations: Advanced Process Technology Group, AIST, Tsukuba, Ibaraki 305-8564, Japan
Publication date: 2005-06-01