Fabrication and Characterization of Three-Dimensional ZrO2-Toughened Al2O3 Ceramic Microdevices
Dense three-dimensional (3D) microdevices of ZrO2-toughened Al2O3 (ZTA) were fabricated using microstereolithography and a subsequent sintering process. Using microstereolithography, 3D green bodies could be formed from a 40 vol% ZTA ceramic–resin paste. After sintering, the fabricated 3D devices are converted into dense ceramic devices without deformation. In this study, a gear (with a tooth edge of 25 m) and a photonic crystal (with a lattice constant of 500 m) were designed and fabricated. The dimensional accuracy of the fabrication process is within 20 m and the sintering shrinkage is around 26% for these microdevices. The relative density of the sintered ZTA ceramics reached 96.5% of theoretical value. The measured hardness and toughness were about 14 GPa and 11 MPa m1/2, respectively, in both the top and side surfaces. A band gap between 320 and 420 GHz was observed in the ZTA photonic crystal. The microstereolithography process can be easily applied to other ceramic materials and devices.
No Supplementary Data
Document Type: Research Article
Affiliations: Joining and Welding Research Institute, Osaka University, Osaka 567-0047, Japan
Publication date: 2008-07-01