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Modelling and Characterizing a Screen-Printed Metallic Electrothermal Microactuator

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A metallic electrothermal microactuator has been fabricated with screen-printing technology based on a sacrificial layer process. The actuator, printed on a standard 96% alumina, consists of two linked copper beams of different widths partially suspended above the substrate to which they are anchored. Energy-dispersive X-rays analyses demonstrate the harmlessness of the process with regard to the metallic layer. While increasing DC voltage between both anchors of the electrothermal microactuator, the deflection is optically measured using a calibrated CCD camera. The temperature distribution measured with an infrared camera in the actuator compares well with that calculated with finite element simulations.

Document Type: Research Article


Affiliations: 1: Laboratoire IMS, Université de Bordeaux I, Talence 33405, France 2: Laboratoire TREFLE, Esplanade des Arts et Métiers, Talence 33405, France

Publication date: October 1, 2007


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