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A Review of Patented Works on the Mechanical Characterization of Materials at Micro- and Nano-Scale

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In recent years, the development of cost-effective processing techniques, novel design concepts and new materials paved the way to a widespread diffusion of micro- and nano-electro-mechanical systems (NEMS/MEMS). Obviously, the reliability as well as the performance of NEMS/MEMS depend on the corresponding materials properties, which in turn should be determined using ad-hoc small samples fabricated at the relevant size-scale. For this reason, in the last decade research efforts have been devoted to the development of experimental techniques suitable for the mechanical characterization of materials at micro- and nano-scale.

There are many contributions stemming from this research area, the purpose of the present work is to give an overview of the most recent patented works. The focus will be directed to selected patents on the mechanical characterization of both micro- and nanosamples, like nanotubes and nanowires. Special emphasis will be given to the methods suited for the determination of elastic properties, fracture resistance and residual stresses of materials.

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Keywords: Bending Tests; Compression Tests; Fatigue Tests; MEMS; NEMS; Nanoindentation Tests; Poisson ratio; Resonant Tests; Tensile Tests; Tension test; Young modulus; alloys; aluminum; atomic force acoustic microscopy (AFAM); atomic force microscopy (AFM); carbon nanotubes; copper; fracture strength; gold; mechanical characterization; mechanical properties; metals and; microscale tests; nanoscale tests; nanostructured; nickel; polycrystalline silicon; polymers; polymide; residual stresses; silicides; silver; single crys-tal silicon; superplasticity; uniaxial tensile load; yield strength; zinc oxide nanowires

Document Type: Research Article

Publication date: 01 January 2011

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  • Recent Patents on Nanotechnology publishes review articles by experts on recent patents on nanotechnology. A selection of important and recent patents on nanotechnology is also included in the journal. The journal is essential reading for all researchers involved in nanotechnology.
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