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Wafer Identification Recognition by Stroke Analysis and Template Matching

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Abstract:

Wafer ID recognition is one of the problems of optical character recognition (OCR). However, due to some unique characteristics, such as different font sizes and styles, the irregular space between adjacent characters, it will not obtain a good result to recognize wafer ID by directly utilizing traditional OCR approaches. Thus, a wafer ID recognition method using stroke analysis and template matching is developed. The wafer ID images are extracted from the binarized images containing wafer ID objects inscribed by laser light in various fonts. Our method performs statistical analysis on stroke patterns obtained from subimages. Experiments are carried out with 1,308 character images in different styles of characters. On average, a recognition accuracy of 99.39% is achieved.

Keywords: OPTICAL CHARACTER RECOGNITION; STROKE ANALYSIS; TEMPLATE MATCHING; WAFER IDENTIFICATIONS

Document Type: Research Article

DOI: https://doi.org/10.1166/sl.2012.2275

Publication date: 2012-05-01

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