A Novel CMOS Compatible Gas Sensor with Stack Electrodes
Abstract:A new proposed gas sensor with stack electrodes was built with small gap of electrodes by using the metal layers in the standard CMOS process. Beyond the conventional finger-type electrodes, the stack electrodes formed from the metal layers of CMOS process provide a lower resistance contact with the sensing material. The proposed gas sensor was built with array of floating membranes and serially connected over an etched cavity. A micro heater of n-type polysilicon with 5.81 kΩ is situated beneath each active area of the membrane to obtain a stable working temperature with several power consumptions conditions. The sensing material SnO2 for CO detection was deposited onto the stack electrodes after sol–gel formation with deionized water and ammonia (NH3) to promote the hydrolysis and condensation. After the sensor fabricated, a test wire-bond and TO-5 package was performed and the sample was test and verified inside a CO gas chamber. With careful investigation of measurement results, the sensitivity of proposed monoxide sensor is 0.0625%/ppm without heating and the sensitivity reaches to 0.157%/ppm under 172 μW heating power which is highly beyond the result of previous research work. Nevertheless, a photo enhanced sensitivity of proposed sensor is also investigated which reveals a new approach of highly sensitive gas sensor. The minimum resolution of CO gas concentration detection is below 4.5 ppm which is proved to be adequate for commercial batch production. The experimental measurement shows the research is applicable for a low cost CO sensor with high sensitivity.
Document Type: Research Article
Publication date: May 1, 2012
More about this publication?
- The growing interest and activity in the field of sensor technologies requires a forum for rapid dissemination of important results: Sensor Letters is that forum. Sensor Letters offers scientists, engineers and medical experts timely, peer-reviewed research on sensor science and technology of the highest quality. Sensor Letters publish original rapid communications, full papers and timely state-of-the-art reviews encompassing the fundamental and applied research on sensor science and technology in all fields of science, engineering, and medicine. Highest priority will be given to short communications reporting important new scientific and technological findings.
- Editorial Board
- Information for Authors
- Subscribe to this Title
- Terms & Conditions
- ingentaconnect is not responsible for the content or availability of external websites