Skip to main content

Investigation on Displacement Measurements in the Large Measuring Range by Utilizing Multibeam Interference

Buy Article:

$113.00 plus tax (Refund Policy)

Abstract:

The laser interferometer has been implemented for the precision displacement measurement and calibration, due to its high resolution of the nanometer order and the large measuring range. Multibeam interferometry is often used for the micro-displacement, because of its common optical path structure being resistive to the environmental disturbances. The conventional multibeam interferometers like Fabry-Perot interferometers are composed by two approximately parallel planar mirrors. With this optical structure, the measuring range will be constrained in micrometers. In this investigation, a modified multibeam interferometer with corner-cube prism has been proposed to resolve the problem. With the new arrangement of the optical path, the displacement measurement will be insensitive to the tilt angle and the optical resolution will be better than that of the conventional multibeam interferometer with two planar mirrors. This will be beneficial to realize the high precision displacement in the large measuring range and under the uncomplicated measuring condition. The experimental results show that the standard deviation is about 0.255 m in measuring range of 160 mm, if the tilt angle is less than ±9." That also proves that the proposed interferometer is feasible for precision displacement measurement in the large range.

Keywords: COMMON OPTICAL PATH; INTERFEROMETRIC DISPLACEMENT MEASUREMENT; MULTIBEAM INTERFERENCE; TILT ANGLE

Document Type: Research Article

DOI: http://dx.doi.org/10.1166/sl.2012.2302

Publication date: May 1, 2012

More about this publication?
  • The growing interest and activity in the field of sensor technologies requires a forum for rapid dissemination of important results: Sensor Letters is that forum. Sensor Letters offers scientists, engineers and medical experts timely, peer-reviewed research on sensor science and technology of the highest quality. Sensor Letters publish original rapid communications, full papers and timely state-of-the-art reviews encompassing the fundamental and applied research on sensor science and technology in all fields of science, engineering, and medicine. Highest priority will be given to short communications reporting important new scientific and technological findings.
  • Editorial Board
  • Information for Authors
  • Subscribe to this Title
  • Terms & Conditions
  • ingentaconnect is not responsible for the content or availability of external websites
asp/senlet/2012/00000010/F0020005/art00011
dcterms_title,dcterms_description,pub_keyword
6
5
20
40
5

Access Key

Free Content
Free content
New Content
New content
Open Access Content
Open access content
Subscribed Content
Subscribed content
Free Trial Content
Free trial content
Cookie Policy
X
Cookie Policy
ingentaconnect website makes use of cookies so as to keep track of data that you have filled in. I am Happy with this Find out more