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Micromachining processes have been successfully developed to fabricate gas ionization sensors using well aligned multi-walled carbon nanotube (MWCNT) arrays grown by chemical vapor deposition (CVD) method. The breakdown and discharge processes have been studied to test the responses
of the gas sensors to dimethyl methylphosphonate (DMMP) which is simulants for chemical warfare nerve agents Sarin. Results showed that the gas sensor could detect DMMP gas down to a 0.1 mg/m3 level. DMMP gas identity and concentration could be determined by monitoring the breakdown
voltage and the discharge current respectively. The as-prepared gas ionization sensors have shown good sensitivity to DMMP with short response or recovery time which shows its great potential in detecting chemical warfare nerve agent.
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